Planning Lead Wires and Connection Points for a Wafer Heater

https://precision-surface-heat.publishlane.com/posts/how-to-choose-a-mica-heating-plate-for-high-temperature-applications

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result